The micro gas mass flowmeter is a device that can display both volumetric and mass flow rates, used for precise measurement and control of gas mass flow. They play an important role in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, industrial, pharmaceutical, environmental protection, and vacuum lamps. Its typical application scenarios include electronic process equipment such as diffusion, epitaxy CVD、 Oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.

Manufacturer of digital micro gas mass flowmeter

● Range accuracy: 1% ● Repeatability: 0.2%
● Range ratio: 100:1 ● Base material: 316L
● Flow range: 2ml~3000L/min ● Calibration gas: nitrogen
● Working temperature: 0-70 ℃ ● Voltage resistance: 3MPA
● Signal: RS-485/PROFIBUS ● Type: Digital, Analog (optional)
Applicable media: inert gases such as compressed air, hydrogen, argon, nitrogen, carbon dioxide, helium, oxygen, ammonia, and various protective gases.
Application scenarios: electronic process equipment, such as diffusion, epitaxy CVD、 Oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.

Product Features

High precision, good repeatability, stable signal

Digital signal, data can be linked to a computer for data export

Short preheating time and small collar float

Not affected by installation orientation

Small size, easy installation, and convenient use