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Manufacturer of intelligent gas mass flowmeter

The gas mass flowmeter solves the interference problem caused by high-pressure and high-speed gas. The product has added lightning protection, secondary pressure bearing, and bursting disc safety design, and can be safely used outdoors 24/7. It can meet the trade settlement and production process measurement of high-pressure hydrogen energy from 35 megapascals to 70 megapascals. Lightweight gas measurement accuracy ± 1.0%, repeatability: 0.25%, temperature accuracy ± 1 ° C. Pressure resistance of liquid receiving components: nominal pressure 70Mpa, maximum allowable continuous working pressure 96.3Mpa.

Manufacturer of intelligent gas mass flowmeter

Manufacturer of intelligent gas mass flowmeter

● Range accuracy: 1% ● Repeatability: 0.2%
● Range ratio: 100:1 ● Base material: 316L
● Flow range: 2ml~3000L/min ● Calibration gas: nitrogen
● Working temperature: 0-70 ℃ ● Voltage resistance: 3MPA
● Signal: RS-485/PROFIBUS ● Type: Digital, Analog (optional)
Applicable media: inert gases such as compressed air, hydrogen, argon, nitrogen, carbon dioxide, helium, oxygen, ammonia, and various protective gases.
Application scenarios: electronic process equipment, such as diffusion, epitaxy CVD、 Oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.

Gas mass flow meter is a device that can display both volumetric flow rate and mass flow rate, used for precise measurement and control of gas mass flow rate. They play an important role in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, industrial, pharmaceutical, environmental protection, and vacuum lamps. Its typical application scenarios include electronic process equipment such as diffusion, epitaxy CVD、 Oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.

Gas mass flowmeter is a device that can simultaneously measure fluid mass flow rate and temperature. Its working principle is quite clever: by detecting the volume flow rate and temperature of the medium flowing through the sensor, and then multiplying these two values, the mass flow rate of the medium can be obtained.

This type of flowmeter has the advantages of high precision, strong stability, and long service life, so it is widely used in fields such as chemical engineering, petroleum, environmental protection, and scientific research.

Gas mass flowmeter measures flow rate at the molecular level. According to the law of conservation of thermodynamic energy, gas molecules passing through the sensor temperature will change, and the mass flow rate of the gas can be calculated based on the temperature change. The signal measured by the heating sensor is then sent to the signal amplifier for amplification. Compare the set voltage with the amplified flow detection voltage. The difference between the two signals is amplified twice and ultimately controls the regulating valve. Finally, the closed-loop control of the flow rate through the channel is equal to the set flow rate, thereby maintaining the gas flow rate steadily at the artificially set flow rate state.

Model numberMM-F1MM-F2MM-F3MM-F4MM-F5MM-F6MM-F7
Flow range0~10ml/min10ml/min~30L/min30~150L/min150~250L/min300~1000L/min1000~2000ml/min2000~3000ml/min
accuracy1.5%F.S
linearity0.5~1.5%F.S
repeatability±0.2%F.S
Response timeElectrical characteristics: 10sec Liquid characteristics: (1~4) sec
Working pressure differentialWorking pressure difference 0.1~0.5MPa
Withstand voltage3MPa
Operating ambient temperature0~70℃
Digital quantityRS485 MODBUS Protocol analogAnalog quantityDC 0~5V
Power supplyDC +15V,Flow meter < 400mA
Electrical connectionDB15
Leakage rate1×10^-8 SCCSHe
Base material316L Stainless steel
Sealing materialFluororubber, butadiene, neoprene
Gas connectionΦ 3,Φ 6,Φ 10,G1/8,G1/4,G3/8

Advantages of gas mass flowmeter

Measurement is more reliable and accurate, unaffected by pressure and temperature.
The measurement range is large, ranging from a few milliliters to several thousand liters.
Widely applicable, almost all gases have suitable mass flow meters.
Small size, light weight, easy to install and maintain small or precision equipment.
High pressure resistance, can be used within 10MPa.